Standards
Standards
»Metrology
8864 / 2024
MICROBEAM ANALYSIS SCANNING ELECTRON MICROSCOPY METHOD FOR EVALUATING CRITICAL DIMENSIONS BY CD-SEM
Endorsement Date
26-02-2024
Pages Count
52
Sector
Metrology
Committee Name
Micron beam analysis.
Standard Type
Price
880 L.E.
Main References
ISO 21466:2019
Standard Status
Adopted
Obligatory Status
Not Obligatory
Decisions Number
ICS
37.020